Apparatus for detecting a sample

ABSTRACT

An apparatus for effectively detecting and calibrating a sample of examination system. The apparatus has an optics-electricity assembly for detecting the sample by a light and an elastically supporting assembly for providing motion freedoms to adjust the relative geometric conditions between the optics-electricity assembly and the sample. The elastically supporting assembly has a planer structure and a cubic structure, and provides both motion freedoms on a plane and motion freedoms vertical to the plane. The optics electricity assembly could analyze the received reflected light to get geometric information of the sample, and could adjust the light used to detect the sample.

FIELD OF THE INVENTION

The present invention relates to a detecting apparatus, and more particularly, to a detecting apparatus capable of precisely detecting and calibrating the geometric information of a sample.

BACKGROUND OF THE RELATED ART

The critical dimension of semiconductor device is continuously decreased, such that the damage induced by any defect on a chip is continuously increased. Hence, high resolution examination (both review and inspection) is required to properly find and check the defect. For example, scanning electron microscope (SEM), as a more advanced examination system, is popularly used for examining chips. In general, a sample (wafer or photomask or semiconductor substrate) is located under a charged particle beam during the examination process. Clearly, whether the sample is correctly located is a key factor of the examining result. In general, one detector is located under the sample and on a base (such as the Z-stage of SEM). The detector will project a light to the sample and analyze a reflected light from the sample. According to the analyzing result, the detector could acquire the geometric information (such as position, direction and angle) of the sample.

There are some drawbacks in the conventional design of the examination system. First, the detector is fixed on the base. Hence, once the base is improperly located (such as the top surface of the base is not parallel to the bottom surface of the sample located on a predetermined position), the detector usually can not properly detect the sample (such as the light is not properly projected from the detector onto the sample, such that the quality of the reflected light is degraded.) Second, only one detector is used to detect the geometric information of the sample. Hence, once the sample has a displacement around the light (or around an axis parallel to the light), the detector usually can not find the displacement.

Therefore, it is desired to develop some new designs of examination system to improve the above drawbacks.

SUMMARY OF THE INVENTION

An apparatus for detecting the geometric information of a sample in an examination system. The apparatus includes an elastically supporting assembly and an optics-electricity assembly. The optics-electricity assembly could project a light beam to the sample, receive a reflected light beam from the sample, and analysis the received reflected light beam to acquire messages about the geometric information (such as position, direction, and tilt angle) of the sample. The elastically supporting assembly could fix the optics-electricity assembly on a base (such as the Z-stage) and adjust the geometric condition of the optics-electricity assembly (such as moving along X-axis, moving along Y-axis, rotating on X-Y plane, tilting on X-Z plane and tilting on Y-Z plane.)

An application of the proposed detecting apparatus is exemplified herein. By adjusting the elastically supporting assembly, the geometric condition of the optics-electricity assembly could be adjusted, for example, the distance between optics-electricity assembly and sample and/or the direction of the light projected by the optics-electricity assembly. Thus, after the geometric condition of the optics-electricity assembly is adjusted to achieve an optimal reflected light from the sample, the elastically supporting assembly could be locked to fix geometric condition of the optics-electricity assembly corresponding to the base. After that, whenever a new sample is appeared to be detected, by comparing the difference(s) between the new reflected light and the optimal reflected light, it is easy to adjust the geometric condition of the new sample, until the new reflected light also is optimized. Moreover, when the examination system (such as SEM) is maintained, the apparatus also could be used to calibrate the relative geometric relation (such as relative distance, relative angle and relative direction) between the base (such as Z-stage) and the sample to be tested. For example, when the location of the sample is not changed but the location of the base might be changed during the maintain process, the apparatus could be used to calibrate the location of the maintained base by comparing the difference(s) between the new reflected light and the optimal reflected light.

Another application of the proposed detecting apparatus is exemplified herein. Because the proposed apparatus usually only projects a light to the sample along only one direction (such as Z-axis), the proposed apparatus only can detect the displacement (or motion) that has a non-zero displacement (or motion) along the direction but can not detect displacement (or motion) totally on a plane vertical to the direction (such as X-Y plane). Therefore, to effectively detect the displacement (or motion) of the sample, it is worth to use two apparatuses that separately projects lights to the sample along two different directions (such as one along X-axis and another along Y-axis).

Some optional improvements of the proposed apparatus are exemplified herein. The elastically supporting assembly could comprise a planar structure and cubic structure. The planar structure may make a restricted linear motion and/or restricted pivot motion relative to a base where the proposed apparatus is located. The cubic structure may make a restricted deformation. Hence, the optics-electricity assembly on the elastically supporting apparatus could be linear moved, pivot moved or tilted.

Some optional improvements of the proposed apparatus are exemplified herein. The optics-electricity assembly could comprise a light source module and an analyzing module. The optics-electricity assembly also could have other improvements, such as beam-splitting module, automatic gain control circuit, background eliminating circuit, and so on. Hence, not only the receive light could be effectively analyzed, but also the generation of light and elimination of noise could be effectively adjusted.

These and other aspects, features and advantages of the present invention can be further understood from the accompanying drawings and description of embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG.1 is a schematic side-view diagram illustrating a system for detecting the geometric information of a sample in accordance with one embodiment of the present invention.

FIG. 2 is a schematic side-view diagram illustrating an elastically supporting assembly in accordance with one embodiment of the present invention.

FIG. 3A is a schematic diagram illustrating the relative motion freedom(s) of the planar structure and the base by linear motion in accordance with one embodiment of the present invention.

FIG. 3B is a schematic diagram illustrating the relative motion freedom(s) of the planar structure and the base by rotation in accordance with one embodiment of the present invention.

FIG. 4A is a schematic side-view diagram illustrating a cubic structure in accordance with one embodiment of the present invention. FIG. 4B is a top view of the exemplary cubic structure in FIG. 4A.

FIG. 4C is a first side view of the exemplary cubic structure in FIG. 4A.

FIG. 4D is a second side view of the exemplary cubic structure in FIG. 4A.

FIG. 4E is a third side view of the exemplary cubic structure in FIG. 4A.

FIG. 4F is a fourth side view of the exemplary cubic structure in FIG. 4A.

FIG. 4G, FIG. 4H, FIG. 4I, FIG. 4J, and FIG. 4K are top, a first side, a second side, a third side, and a fourth side views respectively of FIG. 4A when in operation in accordance with one embodiment of the present invention.

FIG. 5 is a schematic diagram illustrating an exemplary optics-electricity assembly in accordance with the present invention.

FIG. 6 is a schematic diagram illustrating an exemplary optics-electricity assembly in accordance with the present invention.

FIG. 7 is a schematic diagram illustrating an exemplary optics-electricity assembly in accordance with the present invention.

FIG. 8 is a schematic diagram illustrating an exemplary optics-electricity assembly in accordance with the present invention.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 is a schematic side-view diagram illustrating a system for detecting the geometric information of a sample in accordance with one embodiment of the present invention. The exemplary system 10 comprises a holding apparatus 101 and at least one detecting apparatus 103. The holding apparatus 101 is configured for holding a sample 23. The detecting apparatus 103 separated from the sample 23 is capable of detecting the geometric information of the sample 23 by projecting a light beam 103 a on the sample 23. The detecting apparatus 103 comprises an elastically supporting assembly 20 and an optics-electricity assembly 21. The optics-electricity assembly 21 is capable of projecting a light beam 103 a on the sample 23, receiving a reflected light beam 103 a from the sample 23 and analyzing the reflected light beam 103 a. Next, the elastically supporting assembly 20 is capable of supporting the optic-electricity assembly 21, fixing the optics-electricity assembly 21 to a base 201 (such as fixing on the top surface of the Z-stage) and adjusting a relative geometric relation (such as relative distance, relative angle and relative direction) between the optics-electricity assembly 21 and the sample 23. Therefore, by using the elastically supporting assembly 20 to adjust the geometric condition of the optics-electricity assembly 21, the light path of the light beam 103 a is adjustable and then the quality of the received reflected light beam 103 a could be optimized.

As an example, the exemplary system 10 is equipped with a first detecting apparatus 103 for detecting the displacement/motion of the sample 23 on an X-Y plane. A second detecting apparatus 105 is set such that a second light beam 105 a is projected on another surface (such as the side of the sample 23), which is configured for detecting the position variation of the sample 23 on an X-Z plane or a Y-Z plane. In other words, because the sample 23 is a 3-dimensional object having a first edge, a second edge, and a third edge crossing a specific vertex of the sample 23, it is optional to use at least two detecting apparatus 103/105 to separately detect different displacements/motions of the sample 23. For example, one detecting apparatus 103 for detecting (by projecting a light beam) the displacement/motion on one plane defined by the first edge and the second edge, and another detecting apparatus 105 for detecting (by projecting another light beam) the displacement/motion on another plane defined the first edge and the third edge. Of course, the shape of the sample 23 is not restricted. Therefore, the first edge and the second edge could be a same edge if the shape of the surface defined by the first edge and the second edge is chosen from a group consisting of the following: circle, ellipse, oval-shaped, and combination thereof.

FIG. 2 is a schematic side-view diagram illustrating an elastically supporting assembly in accordance with one embodiment of the present invention. The elastically supporting assembly 20 comprises a planar structure 202 and a cubic structure 203. The optic-electricity assembly (not shown in the figure) may be loaded and fixed on the elastically supporting assembly 20. In one option, the planar structure 202 is positioned between the base and the cubic structure 203. Herein, the area between the planar structure 202 and the base is larger than the area between the cubic structure 203 and the planar structure 202, such that the cubic structure 203 is fixed on the base through the planar structure 202. Alternatively, the cubic structure 203 may be positioned between the base and the planar structure 202. Herein, the area between the cubic structure 203 and the base is larger than the area between the planar structure 202 and the cubic structure 203, such that the planar structure 202 is fixed on the base 201 through the cubic structure 203. Clearly, the key is how to use both the planar structure 202 and the cubic structure 203 to provide the required motion freedom, how to combine the planar structure 202 and the cubic structure 203 is not a key of the invention, As an example, the planar structure 202 could be mounted with the cubic structure 203 by a way selected from a group consisting of the following: screw, glue, nail, tack, electric welding, and combination therefore.

Next, the planar structure 202 is equipped with a plurality of fasteners 202 b positioned within a plurality of holes 202 a respectively. It is noted that all of the holes 202 a usually are not designed on only one side of the planar structure 202. For example but not limited to, the holes 202 a are separately located on the two opposite edges of the planar structure 202. For example but not limited to, the holes 202 a are all located on the same edges of the planar structure 202. Moreover, the size of a hole 202 a is larger than the size of a body of a fastener 202 b passing through the hole 202 a and is smaller than the size of an end of the fastener 202 b. Clearly, when the fastener 202 is located in the hole 202 a but not locked, it is capable of moving in the hole 202 a (body of fastener 202 is narrower than the hole 202 a), such that at least one motion freedom is provided. Of course, when the fastener 202 is located in the hole 202 a and locked (end of the fastener 202 b is wider than the hole 202 a), there is no motion freedom. As an example, the shape, the size and the geometric relation of the holes 202 a and the fasteners 202 b are adjusted to allow the optics-electricity assembly (not shown in the figure) loaded by the elastically supporting assembly to have at least one motion freedom before all of the fasteners 202 b are locked. Herein, FIG. 3A and FIG. 3B shows two possible motion freedom. Herein, each motion freedom may be chosen from a group consisting of the following: rotation/pivot on the locked fastener 202 b (the dot arc line with an arrow), rotation/pivot on a point between the fastener 202 b and the planar structure 202, linear motion along a direction parallel to a line crossing both of the holes 202 a (the dot straight line with an arrow), linear motion along a direction vertical to a line crossing both of holes 202 a, and combination thereof. Thus, the planar structure 202 may be crossed or offset the base as shown in FIG. 3A and FIG. 3B, respectively. As an example, to provide the planar structure 202 with a significant motion freedom along the first direction ‘X’, it is simple to adjust the size of the body of the fastener 202 to be significantly smaller than the hole 202 a along a first direction ‘X’ and to adjust the size of the body of the fastener 202 to be slightly narrower than the hole 202 a along a second direction ‘Y.’ Next, as an example, the shape of each hole 202 a could be chosen from a group consisting of the following: quadrangle, oblong, circle, square, and the combination thereof, and each of the fasteners 202 b may be chosen from a group consisting of the following: screw with nut, nail, tack and the combination thereof.

FIG. 4A is a schematic side-view diagram illustrating a cubic structure in accordance with one embodiment of the present invention. FIG. 4B is a top view, FIG. 4C is a first side view, FIG. 4D is a second side view, FIG. 4E is a third side view, and FIG. 4F is a fourth side view of the exemplary cubic structure in FIG. 4A. The cubic structure 203 is equipped with a first cavity 203 a, a second cavity 203 b, a first adjusting device 203 c and a second adjusting device 203 d. The first cavity 203 a is positioned between a top plate 205 b and a bottom plate 205 a. The second cavity 203 b is positioned between a top plate 205 c and a bottom plate 205 b. The corresponding adjusting device, for example, the first adjusting device 203 c comprises a first fastener (not shown in the figure) capable of passing through the top plate 205 c to a top surface of the second plate (plate 205 b) and a second adjusting device 203 d capable of passing through both the top plate 205 b and the top surface of the second plate into a hole being terminated inside the bottom plate 205 a. Next, each of the adjusting devices (203 c and 203 d) could be chosen from a group consisting of the following: screw with nut, nail, tack and the combination therefore. The first fastener is capable of increasing the angular magnitude of a corresponding opening when the first fastener is locked (the end of the first fastener contacts with the second plate, such that the second plate is pushed away when the first fastener is locked into the first plate), and the second fastener is capable of decreasing the angular magnitude of the corresponding opening when the second fastener is locked (the end of the first fastener could be located into the second plate, such that the distance between the first plate and the second plate is decreased when the fastener is locked into the first plate). Further, the first portion of the cubic structure 203 forming the wall 203 e of the first cavity 203 a is partially overlapped with a second portion of the cubic structure forming the wall 203 f of the second cavity 203 b. Herein, the first cavity 203 a is with a first opening oriented towards a first direction and a second cavity 203 b is with a second opening oriented towards a second direction that is different from the first direction, such the deformation induced from the first cavity and the deformation induced from the second cavity is distributed over two different planes (or together forming a 3-dimension deformation).

Referring to FIG. 4B, FIG. 4C, FIG. 4D, FIG. 4E, and FIG. 4F, the first adjusting device 203 c is capable of adjusting an angular magnitude of a first angle θ1 of the first opening and the second adjusting device 203 d is capable of adjusting an angular magnitude of a second angle θ2 of the second opening. The first cavity 203 a and the second cavity 203 b are arranged along a specific direction (for example “Z”) interacting the planar structure (not shown in the figure), such that the deformation of the cubic structure 203 is not totally parallel to the top surface of the planar structure (i.e., the motion freedom(s) induced by the deformation is not totally parallel to the top surface of the planar structure). Herein, the angular magnitudes are in measured along the specific direction.

FIG. 4G, FIG. 4H, FIG. 4I, FIG. 4J, and FIG. 4K are top, a first side, a second side, a third side, and a fourth side views respectively of FIG. 4A when in operation in accordance with one embodiment of the present invention. In the case of compressing the angular magnitude of the second angle θ2, the first cavity 203 a is compressed on the X-Z plane. Similarly, in the case of stressing the angular magnitude of the first angle θ1, the second cavity 203 b is de-compressed on the X-Y plane. According to the description aforementioned from FIGS. 4A to 4K, the exemplary elastically-supporting assembly may provide more freedoms for the adjustment of the optics-electricity assembly to enhance the qualities and precision of the alignment for the optics-electricity assembly.

Furthermore, the cubic structure 203 could be made of elastic material or could be formed to become an elastomer or an elastic structure. According to the configuration of the cubic structure 203 aforementioned, the shape, the size and the geometric relation of the cavities (203 a and 203 b) cooperated with the adjusting devices (203 c and 203 d) are adjusted to allow the optics-electricity assembly (not shown in the figure) loaded by the elastically supporting assembly 20 in FIG. 2 to have at least one motion freedom before the adjusting devices (203 c and 203 d) are locked. The motion freedom is chosen from a group consisting of the following: tilting along the first angle θ1 of the first opening, tilting along the second angle θ2 of the second opening, and the combination thereof.

Accordingly, the adjustment of the relative geometric relation (such as relative position and relative angle) between the optics-electricity assembly 21 and the sample 23 may be achieved by cooperating the cubic structure 203 and the planar structure 202.

FIG. 5 is a schematic diagram illustrating an exemplary optics-electricity assembly in accordance with the present invention. The optics-electricity assembly 21 comprises a light source module 211 capable of emitting a light beam 214 to the sample 23, and an analyzing module 212 capable of analyzing a reflected light beam 215 from the sample 23.

FIG. 6 is a schematic diagram illustrating an exemplary optics-electricity assembly 21 in accordance with the present invention. In the example, the light source module 211 comprises an electrostatic discharge device 211 a electrically coupled with at least one external signal line that receives at least one external signal from an external environment, such that the noise (or the damages induced by electrostatic discharge) from the external environment through the external signal line is effectively blocked. Furthermore, as an example, the light source module 211 comprises a laser diode 211 b driven and controlled by a laser diode driver. The laser diode 211 b is configured for emitting a laser beam as the light beam 214.

Further, the optics-electricity assembly 21 optionally comprises a beam splitting module 216 capable of splitting the light beam 214 and the reflected light beam 215. The beam splitting module 216 could be positioned between the sample 23 and the light source module 211, and/or between the sample 23 and the analyzing module 212. As one example, as shown in FIG. 7, the beam splitting module 216 comprises a first beam splitter 216 a which is capable of reflecting the first portion 214 a of the light beam 214 and reflecting the first portion 215 a of the reflected light beam 215, and allowing the second portion 214 b of the light beam 214 to pass through for projecting on the sample 23 and forming the reflected light beam 215. As another example, as shown in FIG. 8, the beam splitting module 216 may comprise a second beam splitter 216 b and a third beam splitter 216 c located separately and in sequence between the light source module 211 and the sample 23. The second portion 214 c of the light beam 214 is reflected by the second beam splitter 216 b. The third portion 214 d of the light beam 214 passes through the second beam splitter 216 b and the third beam splitter 216 c and projects on the sample 23 to form the reflected light beam 215. Then the first portion 215 c of the reflected light beam 215 is reflected by the third beam splitter 216 c, the second portion 215 d of the reflected light beam 215 passes through the third beam splitter 216 c and the third portion 215 e of the reflected light beam 215 is reflected by the second beam splitter 216 b. Different light splitting modules 216 correspond to different designs of the optics-electricity assembly 21, especially correspond to different designs of the analyzing module 212.

Next, as an example, the analyzing module 212 comprises a position sensor device 212 a and an automatic gain control (AGC) circuit 212 b coupled with the position sensor device 212 a as shown in FIG. 6 or coupled with a first detector 212 d capable of receiving the third portion 215 e of the reflected light beam 215 as shown in FIG. 8. The position sensor device 212 a is capable of receiving the first portion 215 a of the reflected light beam 215 and outputting a detecting signal 218 which is a function of both the incident angle of the second portion 214 b of the light beam 214 on the sample 23 and a projected position of the second portion 214 b of the light beam 214 on the sample 23. Herein, by using proper position sensor device 212, such as commercial position sensor device 212 having four detectors for providing quadrantal detection independently, it is easy to decide whether the second portion 214 b of the light beam 214 is properly projected on the sample 23 and whether the sample 23 is properly located on the predetermined position with predetermined angle. The automatic gain control circuit 212 b is capable of outputting an adjusting signal 219 to the light source module 211 according to a light strength of the first portion 215 a of the reflected light beam 215 or the third portion 215 e of the reflected light beam 215. Then, by referring to the output of the automatic gain control circuit 212 b, the light source module 211 decreases the light strength of the light beam 214 when the light strength of the light beam 214 is larger than a higher threshold. Similarly, the light source module 211 increases the light strength of the light beam 214 when the light strength of the light beam 214 is smaller higher than a lower threshold. Thus, the light source module 211 is capable of adjusting the light strength of the light beam 214 according to the adjusting signal 219, such that the light strength of the first portion 215 a of the reflected light beam 215 could be optimal for proper operation of the analyzing module 212.

Furthermore, as an example, the analyzing module 212 may further comprise a background eliminating circuit 212 c electrically coupled with the position sensor device 212 a. The background eliminating circuit 212 c is capable of eliminating the effect of a background light which is received with the first portion 215 a of the reflected light beam 215 by the position sensor device 212 a simultaneously. There are different approaches to achieve the object of the background eliminating circuit 212 c, bases on the fact that the light source module 211 usually use laser as the light source. First example, the background eliminating circuit 212 c is capable of filtering out the required first portion 215 a of the reflected light beam 215 by only allowing a portion of the received light within specific frequencies (corresponds to the frequencies of the light source module 211) to pass and blocking the other portion of the received light. Second example, background eliminating circuit 212 c is capable of dividing the received light into a continuous portion which distributes over continuous frequencies (corresponds to the backlight) and a discrete portion which discretely distributes only within some specific frequencies (corresponds to the reflected light). Then, the background eliminating circuit 212 c is also capable of producing a simulated light which is essentially out-phase than the continuous portion over all frequencies, such that the continuous portion is cancelled by the simulated light and only the discrete portion is passed.

Furthermore, as an example shown in FIG. 7, for properly adjusting the light strength of the light beam 214 with reference to the reflected portion of the light beam 214 and the operation of the light source module 211, the optics-electricity assembly 21 may further comprise a photo receiver 220 capable of receiving the first portion 214 a of the light beam 214 and producing a corresponding output signal 220 a. A focus lens 222 may be optionally set for focusing the first portion 214 a of the light beam 214 on the photo receiver 222. Optionally, the power limitation circuit 221 is capable of producing a power limitation signal 221 a according the output signal 220 a (which is detected) and a reflection-transmission ratio of the first beam splitter 216 a (which is known when a specific beam splitter is used to form the first beam splitter 216 a). The power limitation signal 221 a is proposition to the actual strength of the light beam 214. Thus, the light source module 211 is capable of adjusting the light strength of the light beam 214. For example, to avoid the risk that only a very small portion of the second portion 214 b of the light beam 214 is reflected (the sample 23 might have a very low reflection coefficient) and then automatic gain control (AGC) circuit 212 b generates the adjusting signal 219 driving the light source module 211 to overly increase the light strength of the light beam 214, the power limitation signal 221 a could be used to restrict the adjusted light strength of the light beam 214 to be smaller than or equal to a maximum allowable light strength of the light source module 211.

Alternatively, as shown in FIGS. 5˜8, the optics-electricity assembly 21 may comprise a light adjusting module 217 capable of adjusting the propagation of the light beam 214 and the reflected light beam 215. The light adjusting module 217 may be positioned between the sample 23 and the light source module 211, and/or between the sample 23 and the analyzing module 212. In one example, the light adjusting module 217 comprises a collimator lens 217 a capable of adjusting a propagation of the light beam 214 for ensuring the propagation of the light beam 214 with less divergence. The light adjusting module 217 may comprise a first plate 217 b with a first aperture for ensuring the uniform light strength of the light beam 214 within a specific cross-sectional area, such that only essentially parallel light is projected on the sample 23 (or such that only a specific cross-section area of incident light with a specific light strength could pass through the first plate 217 b). The light adjusting module 217 may further comprise a second plate 217 c with a second aperture for ensuring the uniform light strength of the reflected light beam 215 within a specific cross-sectional area (e.g. only a specific cross-section area of incident light with a specific light strength could pass through the second plate 217 c). Hence, if the sample 23 is significantly improperly located (such as the sample 23 is far away the predetermined position or the sample 23 is significantly tilted), the reflected light beam 215 will be blocked by second plate 217 c and then the light adjusting module 217 will receive no light, such that it easily finds the significantly displacement of the sample 23. Alternatively, the light adjusting module 217 may further comprises a first focusing lens 217 d locate between the second beam splitter 216 b and the first detector 212 d, which is capable of focusing the third portion 215 e of the reflected light beam 215 into the first detector 212 d.

Although the present invention has been explained in relation to some embodiments, it is to be understood that other modifications and variation can be made without departing the spirit and scope of the invention as hereafter claimed. 

1. A system for detecting a sample, comprising: a holding apparatus for holding a sample; and at least one detecting apparatus, each of said detecting apparatus separated from said sample and capable of detecting a geometric condition of said example by projecting a light beam on said sample, wherein each of said detecting apparatus comprises: an optics-electricity assembly, said optics-electricity assembly capable of projecting a light beam on said sample, receiving a reflected light beam from said sample and analyzing said reflected light beam; and an elastically supporting assembly, said elastically supporting assembly capable of supporting said optic-electricity assembly, fixing said optics-electricity assembly to a base and adjusting a relative geometric relation between said optics-electricity assembly and said sample.
 2. The system as claimed in claim 1, wherein said optics-electricity assembly comprises: a light source module, said light source module capable of emitting said light beam to said sample; and an analyzing module, said analyzing module capable of analyzing said reflected light beam.
 3. The system as claimed in claim 1, wherein said elastically supporting assembly comprises: a planar structure, said planar structure having holes separately located on at least one edge of said planar structure, wherein a size of each of said holes is larger than a size of a body of a fastener passing through said hole and is smaller than a size of an end of said fastener; and a cubic structure, said cubic structure contacting with said planar structure, said cubic structure having a first and a second cavities and a first and a second adjusting devices, wherein said first cavity having a first opening oriented towards a first direction and said second cavity having a second opening oriented towards a second direction that is different from said first direction, wherein said first adjusting device is capable of adjusting an angular magnitude of a first angle of said first opening and said second adjusting device is capable of adjusting an angular magnitude of a second angle of said second opening, wherein said first and second cavities are arranged along a specific direction interacting said planar structure and said angular magnitudes are in measured along said specific direction.
 4. The system as claimed in claim 1, when said sample has a first edge, a second edge and a third edge that crossing a specific vertex of said sample, further comprising a first said detecting apparatus being located such that a first said light beam is projected on a first plane defined by said first edge and said second edge and a second said detecting apparatus being located such that a second said light beam is projected on a second plane defined by said first edge and said third edge, wherein said first edge and said second edge could be a same edge if a shape of said first plane is chosen from a group consisting of the following: circle, ellipse, oval-shaped, and combination thereof.
 5. An apparatus for detecting a sample, comprising: an optics-electricity assembly, said optics-electricity assembly capable of projecting a light beam on a sample, receiving a reflected light beam from said sample and analyzing said reflected light beam; and an elastically supporting assembly, said elastically supporting assembly capable of supporting said optic-electricity assembly, fixing said optics-electricity assembly to a base and adjusting the relative geometric relation between said optics-electricity assembly and said sample, said elastically supporting assembly comprising: a planar structure, said planar structure having holes separately located on at least one edge of said planar structure, wherein the size of each said hole is larger than the size of a body of a fastener passing through said hole and is smaller than the size of an end of said fastener; and a cubic structure, said cubic structure contacting with said planar structure, said cubic structure having at least two cavities and at least two adjusting devices, wherein a first cavity having a first opening with a first direction and said second cavity having a second opening with a second direction that is different than said first direction, wherein a first adjusting device is capable of adjusting an angular magnitude of a first angle of said first opening and a second adjusting device is capable of adjusting an angular magnitude of a second angle of said second opening, wherein said cavities are arranged along a specific direction interacting said planar structure and said angular magnitudes are in measured along said specific direction.
 6. The apparatus as claimed in claim 5, wherein the relation between said planar structure and said cubic structure is chosen from a group consisting of the following: the area between said planar structure and said base is larger than the area between said cubic structure and said planar structure, when said planar structure is located on said base and said cubic structure is located on said planar structure; and the area between said cubic structure and said base is larger than the area between said planar structure and said cubic structure, when said cubic structure is located on said base and said planar structure is located on said cubic structure.
 7. The apparatus as claimed in claim 5, wherein the shape, the size and the geometric relation of said holes said fasteners are adjusted to allow said optics-electricity assembly supported by said elastically supporting assembly to have at least one motion freedom before all said fasteners are locked, said motion freedom being chosen from a group consisting of the following: rotate around a locked said fastener, rotate around a point located between said fastener and on said planar structure, move along a direction which is parallel to a line crossing both said holes, move along a direction which is vertical to a line crossing both said holes, and combination thereof.
 8. The apparatus as claimed in claim 5, when said holes are significantly wider than said fasteners along a first direction and are slightly wider than said fasteners along a second direction, said planar structure having a significant motion freedom along said first direction.
 9. The apparatus as claimed in claim 5, wherein said holes are separately located on two opposite edges of said planar structure.
 10. The apparatus as claimed in claim 5, wherein said cubic structure is made of elastical material.
 11. The apparatus as claimed in claim 5, wherein the shape, the size and the geometric relation of said cavities and said adjusting devices are adjusted to allow said optics-electricity assembly supported by said elastically supporting assembly to have at least one motion freedom before said adjusting devices are locked, said motion freedom being chosen from a group consisting of the following: tilting along said first angle of said first opening, tilting along second angle of second opening, and combination thereof.
 12. The apparatus as claimed in claim 5, wherein a first portion of said cubic structure forming the wall of said first cavity is at most partially overlapped with a second portion of said cubic structure forming the wall of said second cavity.
 13. The apparatus as claimed in claim 5, when one of said cavity is located between a top plate and a bottom plate, wherein a corresponding said adjusting device comprises a first fastener capable of passing through said top plate to a top surface of said second plate and a second fastener capable of passing through said top plate and said top surface of second plate to a hole being terminated inside said bottom plate.
 14. The apparatus as claimed in claim 13, wherein said first fastener being capable of increasing the angular magnitude of a corresponding opening when said first fastener is locked, and said second fastener being capable of decreasing the angular magnitude of said corresponding opening when said second fastener is locked.
 15. An apparatus for detecting a sample, comprising: an optics-electricity assembly, said optics-electricity assembly capable of projecting a light beam on a sample, receiving a reflected light beam from said sample and analyzing said reflected light beam; and an elastically supporting assembly, said elastically supporting assembly capable of supporting said optic-electricity assembly, fixing said optics-electricity assembly to a base and adjusting the relative position between said optics-electricity assembly and said sample; wherein said optics-electricity assembly comprising: a light source module, said light source module being capable of emitting said light beam to said sample; and an analyzing module, said analyzing module being capable of receiving and analyzing said reflected light beam.
 16. The apparatus as claimed in claim 15, wherein said light source module comprise an electrostatic discharge device, said electrostatic discharge device being electrically coupled with at least one external signal line that receives at least one external signal from an external environment.
 17. The apparatus as claimed in claim 16, wherein said optics-electricity assembly comprises a light adjusting module capable of adjusting the propagation of said light beam and said reflected light beam, said light adjusting module being able to locate between said light source module and said sample, said light adjusting module also being able to locate between said sample and said analyzing module.
 18. The apparatus as claimed in claim 17, wherein said light adjusting module comprises at least one of the following: a collimator lens capable of adjusting a propagation of said light beam such that said propagation of said light beam is essentially not divergent; a first plate with a first aperture, such that at most a specific portion of said light beam is passed, wherein said specific portion of said light beam has a specific cross-sectional area and a specific light strength; and a second plate with a second aperture, such that at most a specific portion of said reflected light beam is passed, wherein said specific portion of said reflected light beam has a specific cross-sectional area and a specific light strength.
 19. The apparatus as claimed in claim 15, wherein said optics-electricity assembly comprises a beam splitting module capable of splitting said light beam and said reflected light beam, said beam splitting module being able to locate between said sample and light source module, said beam splitting module also being able to locate between said sample and said analyzing module.
 20. The apparatus as claimed in claim 19, wherein said beam splitting module comprises a first beam splitter, said first beam splitter being capable of reflecting a first portion of said light beam and reflecting a first portion of said reflected light beam, said first beam splitter also being capable of allowing a second portion of said light beam to pass through and project on said sample such that said reflected light beam is formed.
 21. The apparatus as claimed in claim 20, wherein said analyzing module comprises a position sensor device capable of receiving said first portion of said reflected light beam and outputting a detecting signal which is a function of both an incident angle of said second portion of said light beam on said sample and a projected position of said second portion of said light beam on said sample.
 22. The apparatus as claimed in claim 21, wherein said analyzing module comprises an automatic gain control circuit electrically coupled with said position sensor device, said automatic gain control circuit being capable of outputting an adjusting signal according to a light strength of said first portion of said reflected light beam.
 23. The apparatus as claimed in claim 22, wherein said automatic control circuit outputs said adjusting signal to said light source module, such that said light source module decreases said light strength of said light beam when said light strength of said light beam is larger than a higher threshold, also such that said light source module increases said light strength of said light beam when said light strength of said light beam is smaller higher than a lower threshold.
 24. The apparatus as claimed in claim 20, further comprising a photo receiver and a power limitation circuit, said photo receiver being capable of receiving said first portion of said light beam and producing a corresponding output signal, said power limitation circuit being capable of producing a power limitation signal according said output signal and a reflection-transmission ratio of said first beam splitter, such that said light source module is capable of restricting the light strength of said beam light to be smaller than or equal to a maximum allowable light strength of said light source module.
 25. The apparatus as claimed in claim 20, wherein said analyzing module comprises a background eliminating circuit electrically coupled with said position sensor device, said background eliminating circuit being capable of eliminating the effect of a background light which is received with said reflected light beam by said position sensor device simultaneously.
 26. The apparatus as claimed in claim 25, said background eliminating circuit being capable of performing one of the following: filtering a received light which is a combination of said background light and said reflected light beam, such that only a specific portion of a received light with some specific frequencies is passed and other portion of said received light other frequencies is filtered out, wherein said specific frequencies corresponds to the frequencies of said light beam; and analyzing a received light which is a combination of said reflected light beam and said background light, said background eliminating circuit being capable of dividing said received light into a continuous portion which distributes over all frequencies and a discrete portion which distributes only on some specific frequencies, said background eliminating circuit also being capable of producing a simulated light which is essentially out-phase than said continuous portion over all frequencies, such that said continuous portion is cancelled by said simulate light and only said discrete portion is passed, wherein said specific frequencies corresponds to the frequencies of said light beam.
 27. The apparatus as claimed in claim 20, wherein said beam splitting module comprises a second beam splitter and a third beam splitter, said second beam splitter and said third beam splitter being located separately and in sequence between said light source module and said sample, such that a second portion of said light beam is reflected by said second beam splitter and a third portion of said light beam pass through said second light beam, also such that said third portion of said light beam pass through said third beam splitter and projects on said sample to form said reflected light beam, also such that a first portion of said reflected light beam is reflected by said third beam splitter and a second portion of said reflected light beam passes through said third beam splitter, also such that a third portion of said reflected light beam is reflected by said second beam splitter.
 28. The apparatus as claimed in claim 27, wherein said analyzing module comprises a position sensor device capable of receiving said first portion of said reflected light beam and outputting a detecting signal which is a function of both an incident angle of said third portion of said light beam on said sample and a projected position of said third portion of said light beam on said sample.
 29. The apparatus as claimed in claim 27, wherein said analyzing module comprises an automatic gain control circuit electrically coupled with a first detector capable of receiving said second portion of said reflected light beam, said automatic gain control circuit being capable of outputting an adjusting signal according to a light strength of said second portion of said reflected light beam.
 30. The apparatus as claimed in claim 29, wherein said automatic control circuit outputs said adjusting signal to said light source module, such that said light source module decreases said light strength of said light beam when said light strength of said light beam is larger than a higher threshold, also such that said light source module increases said light strength of said light beam when said light strength of said light beam is smaller higher than a lower threshold.
 31. The apparatus as claimed in claim 27, further comprising a photo receiver and a power limitation circuit, said photo receiver being capable of receiving said first portion of said light beam and producing a corresponding output signal, said power limitation circuit being capable of producing a power limitation signal according said output signal and a reflection-transmission ratio of said first beam splitter, such that said light source module is capable of restricting the light strength of said beam light to be smaller than or equal to a maximum allowable light strength of said light source module.
 32. The apparatus as claimed in claim 27, wherein said analyzing module comprises a background eliminating circuit electrically coupled with said position sensor device, said background eliminating circuit being capable of eliminating the effect of a background light which is received with said first portion of said reflected light beam by said position sensor device simultaneously.
 33. The apparatus as claimed in claim 32, said background eliminating circuit being capable of performing at least one of the following: filtering a received light which is a combination of said background light and said first portion of said reflected light beam, such that only a specific portion of said received light with some specific frequencies is passed and other portion of said received light other frequencies is filtered out, wherein said specific frequencies corresponds to the frequencies of said light beam; and analyzing a received light which is a combination of said background light and said first portion of said reflected light beam, said background eliminating circuit being capable of dividing said received light into a continuous portion which distributes over all frequencies and a discrete portion which distributes only on some specific frequencies, said background eliminating circuit also being capable of producing a simulated light which is essentially out-phase than said continuous portion over all frequencies, such that said continuous portion is cancelled by said simulate light and only said discrete portion is passed, wherein said specific frequencies corresponds to the frequencies of said light beam. 